Arbitrary and Parallel Nanofabrication of 3D Metal Structures with Polymer Brush Resists.
نویسندگان
چکیده
3D polymer brushes are reported for the first time as ideal resists for the alignment-free nanofabrication of complex 3D metal structures with sub-100 nm lateral resolution and sub-10 nm vertical resolution. Since 3D polymer brushes can be serially fabricated in parallel, this method is effective to generate arbitrary 3D metal structures over a large area at a high throughput.
منابع مشابه
Inclined nanoimprinting lithography-based 3D nanofabrication
We report a ‘top–down’ 3D nanofabrication approach combining non-conventional inclined nanoimprint lithography (INIL) with reactive ion etching (RIE), contact molding and 3D metal nanotransfer printing (nTP). This integration of processes enables the production and conformal transfer of 3D polymer nanostructures of varying heights to a variety of other materials including a silicon-based substr...
متن کاملAqueous multiphoton lithography with multifunctional silk-centred bio-resists
Silk and silk fibroin, the biomaterial from nature, nowadays are being widely utilized in many cutting-edge micro/nanodevices/systems via advanced micro/nanofabrication techniques. Herein, for the first time to our knowledge, we report aqueous multiphoton lithography of diversiform-regenerated-silk-fibroin-centric inks using noncontact and maskless femtosecond laser direct writing (FsLDW). Init...
متن کاملAtomic Nanofabrication: Perspectives for serial and parallel deposition
Recent advances in atomic nanofabrication with laser manipulated atomic beams are discussed with regard to the creation of arbitrary structures.
متن کاملNanofabrication of high aspect ratio structures using an evaporated resist containing metal.
Organic electron beam resists are typically not resistant to the plasma etching employed to transfer the pattern into the underlying layer. Here, the authors present the incorporation of a metal hard mask material into negative resist polystyrene by co-evaporation of the polystyrene and the metal onto a substrate. With a volume ratio of 1:15 between Cr and polystyrene, this nanocomposite resist...
متن کاملNovel 3D micro- and nanofabrication method using thermally activated selective topography equilibration (TASTE) of polymers
Micro- and nanostructures with three-dimensional (3D) shapes are needed for a variety of applications in optics and fluidics where structures with both smooth and sharp features enhance the performance and functionality. We present a novel method for the generation of true 3D surfaces based on thermally activated selective topography equilibration (TASTE). This technique allows generating almos...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
عنوان ژورنال:
- Small
دوره 11 45 شماره
صفحات -
تاریخ انتشار 2015